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  • Gas Contaminant Test

Contaminants in gas are monitored in situ.


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Monitoring Points

Values

  0.3 μm  0.5 μm

   eg1:

 Clean Air  71

    21

 

   Cleanroom 

(environment)


  218287

    67002

 After Filtration

(air filtration)

  0

    0

   eg2:

 Compressed Gas

  13194

    3260

 

Compressed Gas 

(environment)


  521618

    68972

 

   After Filtration 

(compressed air)

  0

    0